A multilayer correction scheme for spreading resistance measurements
- 31 October 1977
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 20 (10) , 839-848
- https://doi.org/10.1016/0038-1101(77)90173-3
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Spreading resistance calculations for graded structures based on the uniform flux source boundary conditionSolid-State Electronics, 1977
- On the calculation of spreading resistance correction factorsSolid-State Electronics, 1976
- Calculation of spreading resistance correction factorsSolid-State Electronics, 1972
- Application of Multilayer Potential Distribution to Spreading Resistance Correction FactorsJournal of the Electrochemical Society, 1969
- Resistivity of Bulk Silicon and of Diffused Layers in SiliconBell System Technical Journal, 1962