Interactions of water vapor and oxygen with Si(111) surfaces studied by low-energy electron-loss spectroscopy
- 1 October 1977
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 48 (10) , 4360-4364
- https://doi.org/10.1063/1.323428
Abstract
Low‐energy electron‐loss spectroscopy (ELS) has been applied for the studies of interactions of water vapor and oxygen with Si(111) 7×7 surfaces. It has been shown that ELS, due to its high surface sensitivity, is capable of observing the microscopic changes of the surfaces after adsorption, decomposition, desorption, and oxidation. The primary electron energy dependence of the loss spectra has shown a qualitative difference between oxygen‐covered Si(111) and SiO2 surfaces. For SiO2 surfaces, the breakdown of the opticlike selection rule has been observed in the one‐electron transitions at the low primary electron energies.This publication has 17 references indexed in Scilit:
- Electronic structure, spectra, and properties of 4:2-coordinated materials. I. Crystalline and amorphousandPhysical Review B, 1976
- Oxidation of Clean Ge and Si SurfacesPhysical Review Letters, 1975
- Electron orbital energies of oxygen adsorbed on silicon surfaces and of silicon dioxidePhysical Review B, 1974
- Metastable phase ofPhysical Review B, 1974
- Electronic transitions of oxygen adsorbed on clean silicon (111) and (100) surfacesPhysical Review B, 1974
- A study of the oxidation and reduction by water vapour of Si (111) surfaces using auger electron emissionPhysica Status Solidi (a), 1973
- Interactions of Si(111) Surfaces with Oxygen by Electron Bombardment Surface Ion Desorption TechniqueJapanese Journal of Applied Physics, 1972
- Measurement of the Growth of Oxide Layers on Metals by Low-Energy Electron Spectroscopy: AluminumJournal of Vacuum Science and Technology, 1972
- Surface Plasma Oscillations of a Degenerate Electron GasPhysical Review B, 1960
- Trapped Electrons in Irradiated Quartz and Silica: I, Optical AbsorptionJournal of the American Ceramic Society, 1960