Theoretical analysis of the electrode sheath in rf discharges
- 1 February 1989
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 65 (3) , 999-1004
- https://doi.org/10.1063/1.343003
Abstract
Starting from a previous kinetic theory of the plasma boundary layer (charge exchange model of the presheath), we investigate a collisionless planar electrode sheath of a capacitively coupled rf discharge in the frequency range between the ionic and electronic plasma frequencies (ωp+≪ω≪ωp−). The resulting model equations are evaluated in an approximation based on thick-sheath assumptions. We calculate the current-voltage characteristics of the sheath and analyze the voltage distribution in a two-electrode system.This publication has 10 references indexed in Scilit:
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