TfI7: Electrical properties of MOCYD-deposited PZT thin films
- 1 August 1992
- journal article
- Published by Taylor & Francis in Ferroelectrics
- Vol. 133 (1) , 79-84
- https://doi.org/10.1080/00150199208217979
Abstract
Strongly c-axis oriented epitaxial PZT thin films have been successfully grown on (100)MgO and (100)Pt/(100)MgO substrates by using the MOCVD method. The epitaxial relation is (001)PZT 11(001)MgO and [010]PZT 11[010]MgO.Keywords
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