keV particle bombardment of semiconductors: A molecular-dynamics simulation
- 1 July 1989
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 40 (1) , 93-101
- https://doi.org/10.1103/physrevb.40.93
Abstract
Molecular-dynamics simulations have been performed for the keV particle bombardment of Si{110} and Si{100} using a many-body potential developed by Tersoff. Energy and angle distributions are presented along with an analysis of the important ejection mechanisms. We have developed a computer logic that only integrates the equations of motion of the atoms that are struck, thus decreasing the computer time by a factor of 3 from a complete molecular-dynamics simulation.Keywords
This publication has 34 references indexed in Scilit:
- Rh atom ejection from keV ion-bombarded p(2×2)O/Rh{111}: Adsorption site and coverage determination from angle-resolved desorption measurementsThe Journal of Chemical Physics, 1989
- Kilo-electron-volt Ar–ion-induced neutral atom desorption from Rh{331}: Relation of angular distributions to surface structureThe Journal of Chemical Physics, 1988
- Many-body embedded-atom potential for describing the energy and angular distributions of Rh atoms desorbed from ion-bombarded Rh{111}Physical Review B, 1988
- Energy and angular distributions of Rh atoms ejected due to ion bombardment from Rh{111}: A theoretical studyPhysical Review B, 1987
- Ion Beam Spectroscopy of Solids and SurfacesScience, 1982
- Energy and angle resolved SIMS studies of CO on Ni(001)The Journal of Chemical Physics, 1982
- Mechanism of ejection of organic molecules from surfaces by keV ion bombardmentJournal of the American Chemical Society, 1980
- Surface Structure from Angle-Resolved Secondary-Ion Mass Spectrometry: Oxygen on Cu(001)Physical Review Letters, 1979
- Angular Distributions of Ejected Particles from Ion-Bombarded Clean and Reacted Single-Crystal SurfacesPhysical Review Letters, 1978
- Temperature dependence of the sputtered ejection pattern from Ge [10