The negative ion sputter source MISS-585
- 1 February 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 244 (1-2) , 155-157
- https://doi.org/10.1016/0168-9002(86)90757-6
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- The effect of the source optics and the temperature of the sputter surface on the negative ion yield of the sputter source MISS-4MNuclear Instruments and Methods in Physics Research, 1984
- A versatile high intensity negative ion sourceNuclear Instruments and Methods in Physics Research, 1983