Plasma-enhanced deposition of silicon oxynitride films
- 1 April 1987
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 148 (3) , 285-291
- https://doi.org/10.1016/0040-6090(87)90322-1
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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