Phase-step insensitive algorithms for phase-shifting interferometry
- 1 June 1994
- journal article
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 5 (6) , 648-654
- https://doi.org/10.1088/0957-0233/5/6/003
Abstract
Two novel phase extraction algorithms, in which step sizes need not be known or equal, are described. One algorithm requires a minimum of five interferograms from which intensity offset and intensity modulation are calculated at each pixel and the relative phase is calculated for all pixels with respect to a reference pixel. The other algorithm requires two phase stepping mechanisms and a minimum of ten interferograms. The intensity characteristics and reference phase step are calculated at each pixel and a previously published algorithm is used for the final phase calculation.Keywords
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