Spectroscopic ellipsometry for depth profiling of ion implanted materials
- 1 April 1991
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 55 (1-4) , 183-187
- https://doi.org/10.1016/0168-583x(91)96158-h
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Hydrogen implantation into (100) silicon: A study of the released damageNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Algorithm/algorithmus 42 an algorithm for cubic spline fitting with convexity constraintsComputing, 1980
- An Algorithm for Least-Squares Estimation of Nonlinear ParametersJournal of the Society for Industrial and Applied Mathematics, 1963
- Berechnung verschiedener physikalischer Konstanten von heterogenen Substanzen. I. Dielektrizitätskonstanten und Leitfähigkeiten der Mischkörper aus isotropen SubstanzenAnnalen der Physik, 1935