Hydrogen implantation into (100) silicon: A study of the released damage
- 1 March 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 39 (1-4) , 381-385
- https://doi.org/10.1016/0168-583x(89)90808-2
Abstract
No abstract availableKeywords
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