High fluence implantation of nitrogen ions into titanium
- 31 March 1985
- journal article
- Published by Elsevier in Materials Science and Engineering
- Vol. 69 (2) , 489-499
- https://doi.org/10.1016/0025-5416(85)90351-9
Abstract
No abstract availableKeywords
This publication has 16 references indexed in Scilit:
- Modification of Concentration Profiles in Iron and Aluminium by High-Fluence Implantation of Nitrogen and Boron IonsPhysica Status Solidi (a), 1984
- Distribution of nitrogen implanted in iron as a function of fluenceRadiation Effects, 1983
- On the influence of atomic mixing on the evolution of ion-implantation profilesPhilosophical Magazine A, 1982
- Titanium nitride films prepared by ion implantationThin Solid Films, 1981
- Recoil mixing in high-fluence ion implantationNuclear Instruments and Methods, 1980
- Ion bombardment of group IV elemental metal and synthetic nitride filmsThin Solid Films, 1979
- Formation of chemical compounds by ion bombardment of thin transition metal filmsPhysica Status Solidi (a), 1978
- Model calculations of profiles and dose of high dose ion implants influenced by sputteringNuclear Instruments and Methods, 1976
- Phase transformations at bombardment of thin films with ionsPhysica Status Solidi (a), 1975
- On determining spectral peak positions from composite spectra with a digital computerAnalytical Chemistry, 1968