Properties of Y1Ba2Cu3O7-x Superconducting Thin Films Prepared by Reactive Evaporation Method

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Abstract
The superconducting YBa2Cu3O7-x (YBCO) thin films on MgO(100) substrates were prepared by a reactive evaporation method. Superconducting transition temperature and crystal quality were examined as a function of the substrate temperature (T s) and the oxygen partial pressure (P O2 ). The as-grown thin films at the substrate temperature of 620°C exhibited a zero resistance temperature (T czero ) of 83 K with the onset (T conset ) temperature of 88 K under the P O2 of 2×10-3 Torr. The lattice parameter c was about 11.74 Å for the as-grown film with T czero of 80 K and was shortened to about 11.70 Å by the post-annealing at 900°C for 10 min in O2 flow, although T czero was not changed. This phenomena may be ascribed to the deficiency of oxygen in the CuO2 plane of the YBCO layered perovskite structure.