Properties of superconducting Nd1+xBa2−xCu3O7−δ thin films deposited by dc magnetron sputtering
- 3 August 1998
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 73 (5) , 683-685
- https://doi.org/10.1063/1.121947
Abstract
We report the superconducting properties of Nd1+xBa2−xCu3O7−δ thin films deposited by dc magnetron sputtering from stoichiometric Nd1Ba2Cu3O7−δ and off-stoichiometric Nd1.12Ba1.88Cu3O7−δ targets. Highly epitaxial c-axis oriented samples with thicknesses ranging from 5 to 100 nm were obtained on SrTiO3(100) substrates from both targets. A suppression of screw-dislocation mediated growth for off-stoichiometric films is observed by STM, resulting in smooth surfaces with roughness of 2–3 nm on a 1 μm2 area. The effects of the deposition conditions on the structural and superconducting properties are investigated and discussed in relation to the Nd–Ba substitution in the Nd1+xBa2−xCu3O7−δ system.Keywords
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