Plastic flow during thermal oxidation of silicon
- 17 April 1989
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 54 (16) , 1516-1518
- https://doi.org/10.1063/1.101384
Abstract
Is silicon dioxide a viscous liquid or an elastic solid at silicon processing temperatures? Simple calculations using either assumption lead to gross discrepancies with experimental observations. This letter shows that a plastic flow model resolves these discrepancies. Flow develops much sooner than predicted by a linear viscoelastic model. Large deformations (<5%) are accommodated almost entirely by plastic flow. Small deformations are accommodated either elastically or by plastic flow depending on temperature.Keywords
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