Iron impurities in Si3N4 processing
- 1 May 1985
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 20 (5) , 1807-1814
- https://doi.org/10.1007/bf00555287
Abstract
No abstract availableKeywords
This publication has 15 references indexed in Scilit:
- On reactions between silicon and nitrogenJournal of Materials Science, 1983
- Nitridation of Si(111) by nitrogen atomsSurface Science, 1981
- A mechanism for the nitridation of Fe-contaminated siliconJournal of Materials Science, 1978
- Effect of Fe and Al additions on nitridation of siliconJournal of Materials Science, 1977
- Comparative Studies of Metal Additives on the Nitridation of SiliconJournal of the American Ceramic Society, 1977
- Mass Spectrometric Studies of the Nitridation of SiliconJournal of the American Ceramic Society, 1975
- A mechanism for the nitridation of silicon powder compactsJournal of Materials Science, 1974
- Kinetics of Nitridation of Si Powder CompactsJournal of the American Ceramic Society, 1973
- A study of the nitridation of silicon surfaces by low-energy electron diffraction and auger electron spectroscopySurface Science, 1973
- Kinetics of the Oxidation and Nitridation of Silicon at High TemperaturesThe Journal of Physical Chemistry, 1958