Mass Spectrometric Studies of the Nitridation of Silicon
- 1 July 1975
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 58 (7-8) , 271-273
- https://doi.org/10.1111/j.1151-2916.1975.tb11473.x
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- A mechanism for the nitridation of silicon powder compactsJournal of Materials Science, 1974
- Kinetics of Nitridation of Si Powder CompactsJournal of the American Ceramic Society, 1973
- Effect of Oxygen Impurities on the Nitridation of High‐Purity SiliconJournal of the American Ceramic Society, 1973
- Molecular Beams in High Temperature ChemistryPublished by Elsevier ,1969
- Passivity during the Oxidation of Silicon at Elevated TemperaturesJournal of Applied Physics, 1958
- Kinetics of the Oxidation and Nitridation of Silicon at High TemperaturesThe Journal of Physical Chemistry, 1958