Sputtered Aluminum Nitride on Silicon for SAW Device Applications
- 1 January 1981
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Zinc-oxide–on–silicon surface acoustic wave resonatorsApplied Physics Letters, 1980
- Zinc Oxide on Silicon Acoustoelectric DevicesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1979
- Properties of Reflective Arrays for Surface Acoustic ResonatorsIEEE Transactions on Sonics and Ultrasonics, 1976
- Evaluation of new single crystal piezoelectric materials for surface acoustic-wave applicationsUltrasonics, 1970