A glow discharge mass spectrometry study of reactive sputtering
- 1 January 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 76 (1) , 35-44
- https://doi.org/10.1016/0040-6090(81)90063-8
Abstract
No abstract availableThis publication has 25 references indexed in Scilit:
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