MEPHISTO spectromicroscope reaches 20 nm lateral resolution
- 1 March 1999
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 70 (3) , 1740-1742
- https://doi.org/10.1063/1.1149661
Abstract
The recently described tests of the synchrotron imaging photoelectron spectromicroscope MEPHISTO (Microscope à Emission de PHotoélectrons par Illumination Synchrotronique de Type Onduleur) were complemented by further resolution improvements and tests, which brought the lateral resolution down to 20 nm. Images and line plot profiles demonstrate such performance.Keywords
This publication has 10 references indexed in Scilit:
- Soft-x-ray transmission photoelectron spectromicroscopy with the MEPHISTO systemReview of Scientific Instruments, 1998
- MEPHISTO: Performance tests of a novel synchrotron imaging photoelectron spectromicroscopeReview of Scientific Instruments, 1998
- Fast elemental mapping and magnetic imaging with high lateral resolution using a novel photoemission microscopeJournal of Electron Spectroscopy and Related Phenomena, 1998
- Evaluation of aberration coefficients of practical electrostatic lenses for X-ray absorption micro-spectroscopy and imagingNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1994
- Photoemission spectromicroscopy of neuronsPhysical Review E, 1993
- An electrostatic microscope for synchrotron radiation x-ray absorption microspectroscopy (invited)Review of Scientific Instruments, 1992
- Scanning Tunneling Microscopy of Galena (100) Surface Oxidation and Sorption of Aqueous GoldScience, 1991
- A UHV-compatible photoelectron emission microscope for applications in surface scienceUltramicroscopy, 1991
- STM investigation of galena surfaces in airSurface Science, 1990
- Photoelectron microscopy with synchrotron radiationReview of Scientific Instruments, 1988