Anomalous depth profiles of light ions and noble gases implanted into polymers
- 1 March 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 39 (1-4) , 800-804
- https://doi.org/10.1016/0168-583x(89)90900-2
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Implanted boron depth profiles in the AZ111 photoresistJournal of Applied Physics, 1988
- Dose and energy dependence of implanted ion profiles (9:≦ 1 ≦ 83) in the AZ111 photoresistNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Mass and energy dependence of implanted ion profiles in the AZ111 photoresistJournal of Applied Physics, 1986
- Range distributions and thermal behaviour of Bi implanted into kcl and Al/KCl bilayer structuresNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980