An advanced x-ray stepper for 1 5 -μm SR lithography
- 31 March 1992
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 17 (1-4) , 141-144
- https://doi.org/10.1016/0167-9317(92)90028-p
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Evaluation of a vertical x-ray stepperMicroelectronic Engineering, 1991
- An optical-heterodyne alignment technique for quarter-micron x-ray lithographyJournal of Vacuum Science & Technology B, 1989
- Self-development mechanism of nitrocellulose: Heating effectJournal of Vacuum Science & Technology B, 1989
- A vertical stepper for synchrotron x-ray lithographyJournal of Vacuum Science & Technology B, 1989
- NTT superconducting storage ring—Super-ALISReview of Scientific Instruments, 1989