Efficient 3-D simulation of complex structures
- 1 January 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
- Vol. 10 (9) , 1141-1149
- https://doi.org/10.1109/43.85760
Abstract
A 3-D general-purpose device simulator is presented, and issues related to its geometrical flexibility and computational efficiency are discussed. Triangular-based prismatic elements are used as building blocks for the discretization of device equations, providing a reasonable tradeoff between simplicity and geometrical flexibility. Suitable numerical techniques, including a `local-solution' algorithm, have been implemented in order to improve the computational efficiency of the code. A general treatment has been devised to handle floating-gate devices, which allows the program to cope with complex structures, such as a dual EPROM structure. Three-dimensional and two-dimensional simulation results are comparedKeywords
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