Calibration method for rotating-analyzer ellipsometers
- 1 September 1988
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America A
- Vol. 5 (9) , 1466-1471
- https://doi.org/10.1364/josaa.5.001466
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 8 references indexed in Scilit:
- Systematic and random errors in rotating-analyzer ellipsometryJournal of the Optical Society of America A, 1988
- Improved measurement method in rotating-analyzer ellipsometryJournal of the Optical Society of America A, 1984
- High Precision Scanning EllipsometerApplied Optics, 1975
- Analysis of systematic errors in rotating-analyzer ellipsometers*Journal of the Optical Society of America, 1974
- Effects of component optical activity in data reduction and calibration of rotating-analyzer ellipsometersJournal of the Optical Society of America, 1974
- Design and Operation of ETA, an Automated EllipsometerIBM Journal of Research and Development, 1973
- Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometryJournal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1963