Hot-implantation of nitrogen donors into p- type α-SiC and characterization of n+-p junction
- 1 March 1997
- journal article
- research article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 26 (3) , 165-171
- https://doi.org/10.1007/s11664-997-0144-2
Abstract
No abstract availableKeywords
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