A study of secondary molecular ion formation in rare earth and rare earth oxides

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Abstract
Secondary atomic and molecular ion energy spectra have been obtained for several rare earth and rare earth oxide samples. The energy dependencies of the diatomic ions were found to be a product of the energy dependencies of the atomic ions. Qualitative agreement of this product rule is also found for larger clusters. A recombination mechanism for molecular formation is demonstrated to be consistent with these results. Several preliminary ion implant studies are presented to give further insight into the recombination model.