Successful operation of a scanning ion microscope with quadrupole mass filter
- 1 January 1976
- journal article
- letter
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 47 (1) , 157-158
- https://doi.org/10.1063/1.1134472
Abstract
An ion microprobe has been combined with a quadrupole equipped secondary ion mass spectrometer. Operating the microprobe in the raster scanning mode, ion images with a lateral resolution of about 10 μ could be obtained. Moreover, the system provides stereoscopic imaging. In‐depth profiling capabilities of the instrument are also described briefly.Keywords
This publication has 8 references indexed in Scilit:
- Secondary-ion mass analysis: Instrumentation, data interpretation, and applicationsJournal of Vacuum Science and Technology, 1974
- Theoretical and experimental aspects of secondary ion mass spectrometryVacuum, 1974
- SIMS with a standard quadrupole residual gas analyzerReview of Scientific Instruments, 1974
- A Simple, Inexpensive SIMS ApparatusReview of Scientific Instruments, 1973
- A low background secondary ion mass spectrometer with quadrupole analyserInternational Journal of Mass Spectrometry and Ion Physics, 1973
- Diffusion barrier model for the cyanide ion-selective electrodeAnalytical Chemistry, 1972
- Analysis of surfaces utilizing sputter ion source instrumentsSurface Science, 1971
- Tandem Mass Spectrometer for Secondary Ion StudiesReview of Scientific Instruments, 1971