Si(L V V) Auger spectra of amorphous Si-oxide, Si-nitride, and Si-oxinitride
- 1 May 1980
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 51 (5) , 2566-2568
- https://doi.org/10.1063/1.327981
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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