Calcia-stabilized zirconia thin films in GaAs metal/insulator/semiconductor technology: Reduction of GaAs native oxide
- 1 January 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 103 (1-3) , 221-242
- https://doi.org/10.1016/0040-6090(83)90438-8
Abstract
No abstract availableKeywords
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