Absolute intensities of the vacuum ultraviolet spectra in a metal-etch plasma processing discharge
- 1 November 1999
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 17 (6) , 3209-3217
- https://doi.org/10.1116/1.582044
Abstract
No abstract availableThis publication has 32 references indexed in Scilit:
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