Ion energy distributions in a special glow-discharge ion source
- 1 June 1986
- Vol. 36 (6) , 329-335
- https://doi.org/10.1016/0042-207x(86)90013-8
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- A special grow discharge source of positive ionsVacuum, 1985
- Energies of particles at the cathode of a glow dischargeVacuum, 1984
- Energy distributions of particles striking the cathode in a glow dischargePhysical Review A, 1983
- The negative end of cold cathode glow dischargesJournal of Physics D: Applied Physics, 1981
- Relationship between Energetic Neutrals and Impurities in Sputtered FilmsJapanese Journal of Applied Physics, 1979
- A glow discharge ion gun for etchingVacuum, 1973
- The operation of a glow discharge ion gun used for specimen thinningJournal of Physics E: Scientific Instruments, 1971
- Ion Energies at the Cathode of a Glow DischargePhysical Review B, 1963
- Theorien des KathodenfallsContributions to Plasma Physics, 1960
- Measurement of Electric Fields as Applied to Glow DischargesReview of Scientific Instruments, 1955