Soft x-ray multilayer phase shifter
- 1 January 1992
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (1) , 1510-1512
- https://doi.org/10.1063/1.1143007
Abstract
Phase shift versus incident angle characteristics of soft x‐ray multilayer mirrors have been studied for the first time by rotating analyzer ellipsometry at 97 eV photon energy. Synchrotron radiation was used as a linear polarization source and a multilayer polarizer of 97% polarizance was used as the analyzer. By the reflection at two multilayers mounted in the double crystal configuration, circular polarization was produced. This confirmed a total phase shift of 90° and proved the usefulness of the multilayer as a phase shifter for polarization evaluation.Keywords
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