Characterization of zirconium dioxide film formed by plasma enhanced metal-organic chemical vapor deposition
- 1 May 1993
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 227 (1) , 7-12
- https://doi.org/10.1016/0040-6090(93)90179-s
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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