IR spectroscopy and X-ray topography study of annealing of proton bombarded silicon
- 16 August 1981
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 66 (2) , K101-K103
- https://doi.org/10.1002/pssa.2210660252
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- On some proton radiation effects in siliconPhysica Status Solidi (a), 1981
- New infra-red absorption bands in hydrogen-implanted siliconPhysics Letters A, 1979
- (Invited) Characterization of Plasma-Deposited Amorphous Si: H Thin FilmsJapanese Journal of Applied Physics, 1979