Quantitative Auger electron spectroscopic analysis of carbides, nitrides and carbonitrides
- 31 December 1987
- journal article
- Published by Elsevier in Spectrochimica Acta Part B: Atomic Spectroscopy
- Vol. 42 (4) , 533-542
- https://doi.org/10.1016/0584-8547(87)80032-0
Abstract
No abstract availableKeywords
This publication has 17 references indexed in Scilit:
- Quantitative auger electron analysis of titanium nitridesSurface Science, 1985
- Analysis of Reactively Ion Plated Titanium-Nitrid FilmsPublished by Springer Nature ,1983
- Applications of TiN thin films in silicon device technologyThin Solid Films, 1982
- Chemical Shifts of Auger Lines in Solids on the Example of the KL23L23 Transition in Silicon and Its CompoundsPhysica Status Solidi (b), 1982
- Auger and x-ray characterization of surface nitride films on Ti, Zr, and HfJournal of Vacuum Science and Technology, 1982
- TiN coatings on steelThin Solid Films, 1981
- Thermal stability of titanium nitride for shallow junction solar cell contactsJournal of Applied Physics, 1981
- Titanium nitride film as a protective coating for a vacuum deposition chamberThin Solid Films, 1979
- Quantitative auger electron analysis of homogeneous binary alloys: Chromium in goldSurface Science, 1977
- Chemische Effekte bei der Auger-Elektronen-SpektroskopiePublished by Springer Nature ,1974