Preparation of Pb(Zr, Ti)O3 Thin Films Using All Dipivaloylmethane Source Materials by Metalorganic Chemical Vapor Deposition
- 1 September 1992
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 31 (9S)
- https://doi.org/10.1143/jjap.31.2995
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Preparation and properties of (Pb,La)(Zr,Ti)O3 thin films by metalorganic chemical vapor depositionJournal of Applied Physics, 1992
- Preparation of C-Axis-Oriented PLT Thin Films by the Metalorganic Chemical Vapor Deposition MethodJapanese Journal of Applied Physics, 1990
- Preparation of c-Axis-Oriented PbTiO3 Thin Films by MOCVD under Reduced PressureJapanese Journal of Applied Physics, 1989