A production process of silicon sensor elements for a fibre-optic pressure sensor
- 30 September 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 63 (1) , 69-74
- https://doi.org/10.1016/s0924-4247(97)80430-x
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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