Stoichiometric analysis of a barium strontium titanate film by heavy ion recoil spectrometry
- 1 June 1995
- journal article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 9 (1-3) , 243-250
- https://doi.org/10.1080/10584589508012929
Abstract
Heavy ion recoil spectrometry employing 77 and 98 MeV 127I ions has been used to analyse thin films of barium strontium titanate (BST) at the new heavy ion recoil facility at ANSTO, Lucas Heights. Depth profiles for all major elements and carbon have been obtained. Analysis reveals depletion of oxygen in the BST layer next to the platinum electrode and interdiffusion of strontium and oxygen through the layers.Keywords
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