RBS and recoil spectrometry analysis of CoSi2 formation on GaAs

This publication has 13 references indexed in Scilit:

• HEIRD analysis of the low-Z deposits on probes from the vessel walls of fusion experiments
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
• High energy ERDA with very heavy ions using mass and energy dispersive spectrometry
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
• Stoichiometry and profiling of surface layers by means of TOF-E ERDA and RBS
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
• High-resolution recoil spectrometry for separate characterization of Ga and As in AlxGa(1−x)As structures
  Applied Physics Letters, 1992
• Mass resolution of recoil fragment detector telescopes for 0.05–0.5 A MeV heavy recoiling fragments
  Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1991
• Characterisation of CoSi₂/- and TiSi₂/n-GaAs Schottky barriers
  Semiconductor Science and Technology, 1990
• Determination of concentration profiles by elastic recoil detection with a ΔE−E gas telescope and high energy incident heavy ions
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
• Planar Ge/Pd and alloyed Au-Ge-Ni ohmic contacts to n-AlxGa1−xAs (0≤x≤0.3)
  Applied Physics Letters, 1989
• A UHV-compatible ΔE−E gas telescope for depth profiling and surface analysis of light elements
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
• Quantitative mass and energy dispersive elastic recoil spectrometry: Resolution and efficiency considerations
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987