Study of Beam Divergence of a Low-Energy (1–3 keV) Ion Source
- 1 June 1983
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 22 (6R) , 1071
- https://doi.org/10.1143/jjap.22.1071
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- A Study of the Ion Beam Intensity and Divergence Obtained from a Single Aperture Three Electrode Extraction SystemReview of Scientific Instruments, 1973