Investigation of UV-laser induced metallization: Platinum from Pt (PF3)4
- 1 November 1985
- journal article
- research article
- Published by Springer Nature in Applied Physics A
- Vol. 38 (3) , 227-233
- https://doi.org/10.1007/bf00616501
Abstract
No abstract availableKeywords
This publication has 21 references indexed in Scilit:
- A highly efficient source for vapor deposition of platinumThin Solid Films, 1983
- A review of laser–microchemical processingJournal of Vacuum Science & Technology B, 1983
- Surface-catalyzed photochemical reactions of physisorbed moleculesApplied Physics A, 1983
- Laser induced chemical vapor deposition of Ni by decomposition of Ni(CO)4Applied Physics A, 1983
- Photodeposition of Ti and application to direct writing of Ti:LiNbO3 waveguidesApplied Physics Letters, 1983
- Deposition of chromium films by multiphoton dissociation of chromium hexacarbonylJournal of Applied Physics, 1982
- Photodeposition of metal films with ultraviolet laser lightJournal of Vacuum Science and Technology, 1982
- UV photolysis of van der waals molecular filmsChemical Physics Letters, 1981
- Deposition of metal films by the controlled decomposition of organometallic compounds on surfacesThin Solid Films, 1980
- Chemical Vapor Deposition of Thin-Film PlatinumJournal of the Electrochemical Society, 1973