Laser induced chemical vapor deposition of Ni by decomposition of Ni(CO)4
- 1 May 1983
- journal article
- research article
- Published by Springer Nature in Applied Physics A
- Vol. 31 (1) , 13-18
- https://doi.org/10.1007/bf00617182
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Rapid Determination of Apparent Activation Energies in Chemical Vapor DepositionJournal of the Electrochemical Society, 1983
- Ar+ laser induced chemical vapor deposition of Si from SiH4Applied Physics Letters, 1982
- Cadmium deposition on transparent substrates by laser induced dissociation of Cd(CH3)2 at visible wavelengthsApplied Physics A, 1982
- Laser microreaction for deposition of doped silicon filmsApplied Physics Letters, 1981
- Laser induced chemical vapor deposition of carbonApplied Physics Letters, 1981
- Abstract: Laser chemical vapor deposition of metals and insulatorsJournal of Vacuum Science and Technology, 1979