Laser induced chemical vapor deposition of carbon
- 1 December 1981
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 39 (11) , 921-923
- https://doi.org/10.1063/1.92607
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Laser-induced chemical vapor deposition of polycrystalline Si from SiCl4Applied Physics Letters, 1980
- Laser-induced vapor deposition of siliconApplied Physics Letters, 1979
- Laser photodeposition of metal films with microscopic featuresApplied Physics Letters, 1979
- Chemical vapor deposition of silicon using a CO2 laserApplied Physics Letters, 1978
- Formation of thin rods of pyrolytic carbon by heating with a focused carbon dioxide laserMaterials Research Bulletin, 1972