Transmission electron microscopy of a-Si:H/a-SiNx:H multilayers
- 1 December 1985
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 77-78, 1061-1064
- https://doi.org/10.1016/0022-3093(85)90840-3
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Physical microstructure in device-quality hydrogenated amorphous siliconJournal of Non-Crystalline Solids, 1984
- Growth and structure of layered amorphous semiconductorsJournal of Non-Crystalline Solids, 1984
- Heterogeneities and surface effects in glow discharge deposited hydrogenated amorphous silicon filmsThin Solid Films, 1982
- Proton spin-lattice relaxation in plasma-deposited amorphous silicon-hydrogen filmsPhysical Review B, 1981