Anomalous Leakage Current Reduction by Ramping Rate Control in Mev Implantation

Publisher Website

1 January 1995

journal article
Published by Springer Nature in MRS Proceedings

Vol. 396
https://doi.org/10.1557/proc-396-739

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Improvement of CMOS latch-up immunity using a high energy implanted buried layer
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989