Explosive crystallization in single-crystal silicon amorphized by implantation
- 1 January 1983
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 54 (1) , 395-397
- https://doi.org/10.1063/1.331716
Abstract
Both solid‐ and liquid‐phase explosive crystallization occur in mono‐Si amorphized by implantation, in addition to solid‐phase epitaxy (SPE). As in deposited a‐Si, the two corresponding furnacelike crystallization regimes are observed when the dwell time is too short for a complete SPE.This publication has 5 references indexed in Scilit:
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