Reactive sputter deposition of polycrystalline nitride and oxide superlattice coatings
- 1 December 1996
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 86-87, 170-176
- https://doi.org/10.1016/s0257-8972(96)02977-5
Abstract
No abstract availableThis publication has 29 references indexed in Scilit:
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