Impedance of humidity sensitive metal/porous silicon/n-Si structures
- 1 October 2003
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 107 (1) , 1-6
- https://doi.org/10.1016/s0924-4247(03)00231-0
Abstract
No abstract availableKeywords
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