Preparation of SiC ultrafine particles from SiH2Cl2 and C2H4 gas mixtures by a CO2 laser
- 1 January 1992
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science
- Vol. 27 (22) , 6091-6097
- https://doi.org/10.1007/bf01133755
Abstract
No abstract availableKeywords
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