Controlling output gain uniformity by spatial variation of the X-ray preionization in a large-aperture discharge-pumped KrF amplifier
- 1 January 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Quantum Electronics
- Vol. 30 (9) , 2147-2156
- https://doi.org/10.1109/3.309877
Abstract
No abstract availableKeywords
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