Charge transport in boron-doped diamond thin films
- 1 May 1991
- journal article
- Published by Taylor & Francis in Philosophical Magazine Part B
- Vol. 63 (5) , 1031-1036
- https://doi.org/10.1080/13642819108207582
Abstract
Detailed studies are reported for the temperature dependence of nominally undoped and boron-doped diamond thin films over the temperature range 400 to 150K; boron doping concentrations in the films range from 20 to 968 parts per million. In all samples, no single-valued activation energy is observed although the dependence on temperature systematically decreases with increasing boron con-centration. This suggests that the acceptor states introduced by the boron are themselves energetically situated in a relatively high density of impurity or defect states extending from the valence band edge. It is believed that charge transport in these films involves a combination of extended-state conduction and hopping within these distributions of localized states and evidence of impurity band formation is observed.Keywords
This publication has 17 references indexed in Scilit:
- Boron doping of diamond thin filmsApplied Physics Letters, 1989
- Emerging Technology of Diamond Thin FilmsChemical & Engineering News, 1989
- Thermal conductivity of synthetic diamond filmsJournal of Applied Physics, 1988
- Electrical characteristics of Schottky diodes fabricated using plasma assisted chemical vapor deposited diamond filmsApplied Physics Letters, 1988
- Diamond crystal growth by plasma chemical vapor depositionJournal of Applied Physics, 1988
- Effects of Oxygen on CVD Diamond SynthesisJapanese Journal of Applied Physics, 1987
- Characterization of conducting diamond filmsVacuum, 1986
- Vapor Deposition of Diamond Particles from MethaneJapanese Journal of Applied Physics, 1982
- Thermoelectric power in phosphorous doped amorphous siliconPhilosophical Magazine, 1977
- Boron, the Dominant Acceptor in Semiconducting DiamondPhysical Review B, 1973